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광주과학기술원 AI대학원

논문[19]

#19. Improvement of Virtual Diagnostics Performance for Plasma Density in Semiconductor Etch Equipment Using Variational Auto-Encoder

2022.5 · IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

(DOI) https://doi.org/10.1109/TSM.2022.3154366

#18. Impact of Sentence Representation Matching in Neural Machine Translation

2022.2 · APPLIED SCIENCES-BASEL

(DOI) https://doi.org/10.3390/app12031313

발표[5]

#5. Effect of pre-training to build a regression model using shallow neural network for semiconductor plasma etch process equipment

8th IEEE International Conference on Big Data, Big Data 2020

2020.12

#4. Time-sensitive adaptation of regularization strength of recurrent neural networks for accurate learning

2017 16th IEEE International Conference on Machine Learning and Applications (ICMLA)

2017.12

특허[1]

#1. 씬 그래프 생성장치

[출원] 2020-0109333

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