ResearchWho?

안지훈

부교수

한양대학교(ERICA) 공학대학 재료화학공학과

논문[48]

#48. Effects of Zr content and annealing on ferroelectricity of as-grown crystalline Hf1-xZrxO2 thin films using Hf[Cp(NMe2)3] and Zr[Cp(NMe2)3] precursors via atomic layer deposition

2022.09 · Ceramics International

(DOI) https://doi.org/10.1016/j.ceramint.2022.05.397

#47. Advanced Atomic Layer Deposition: Ultrathin and Continuous Metal Thin Film Growth and Work Function Control Using the Discrete Feeding Method

2022.06 · Nano Letters

(DOI) https://doi.org/10.1021/acs.nanolett.2c00811