ResearchWho?

김우희

Associate Professor

한양대학교(ERICA) 공학대학 재료화학공학과

논문[64]

#64. Enhanced selectivity of atomic layer deposited Ru thin films through the discrete feeding of aminosilane inhibitor molecules

2021 · Applied Surface Science

(DOI) https://doi.org/10.1016/j.apsusc.2020.148247

#63. Wafer-Scale Growth of a MoS<sub>2</sub>Monolayer via One Cycle of Atomic Layer Deposition: An Adsorbate Control Method

2021 · Chemistry of Materials

(DOI) https://doi.org/10.1021/acs.chemmater.1c00729

특허[15]

#15. Semiconductor device and method for fabricating the same

[출원] 14/271,909

미국

#14. Memory Arrays, and Methods of Forming Memory Arrays,

[출원] 15/422,335

미국