ResearchWho?

이해준

겸임교수

부산대학교 공과대학 전기공학과

논문[45]

#45. Importance of higher‐level excited species in argon remote plasma sources: Numerical modeling with consideration of detailed chemical reaction pathways

Plasma Processes and Polymers

(DOI) https://doi.org/10.1002/ppap.202100251

#44. Two‐dimensional analysis for the transition from nonlocal to local electron kinetics and its effect on the spatial uniformity of a capacitively coupled plasma

Plasma Processes and Polymers

(DOI) https://doi.org/10.1002/ppap.202100196