ResearchWho?
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    염근영
    Position 교수
    Current Department 성균관대학교 공과대학 신소재공학부
    프로필
    연구 성과
    논문[476]
    #476. Low temperature silicon nitride grown by very high frequency (VHF, 162MHz) plasma enhanced atomic layer deposition with floating multi-tile electrode
    Journal Information 2022.10 · Surfaces and Interfaces
    Identifier (DOI) https://doi.org/10.1016/j.surfin.2022.102219
    #475. Atomic layer etching of Sn by surface modification with H and Cl radicals
    Journal Information 2022.10 · Nanotechnology
    Identifier (DOI) https://doi.org/10.1088/1361-6528/ac9981
    프로시딩[1]
    #1. A team-based firefighter training platform using the virtual environment
    Journal Information 2010.1
    Identifier (DOI) https://doi.org/10.1145/1900179.1900242
    발표[17]
    #17. Characteristics of Plasma-activated Dielectric Film Surfaces for Direct Wafer Bonding
    Organization 2020 IEEE 70th Electronic Components and Technology Conference (ECTC)
    Date 2020.6
    #16. Novel damage-free high-k removal for sub-32nm metal gate/high-k LSTP CMOSFETs using neutral beam-assisted atomic layer etching
    Organization Proceedings of 2011 International Symposium on VLSI Technology, Systems and Applications
    Date 2011.4
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