ResearchWho?

김태성

교수

성균관대학교 공과대학 기계공학부

논문[515]

#515. The mechanical effect of soft pad on copper chemical mechanical polishing

Materials Science in Semiconductor Processing

(DOI) https://doi.org/10.1016/j.mssp.2022.107256

#514. Development of novel multi-selective slurry with mechanically driven etching for through silicon via chemical mechanical polishing

2022.12.01 · Materials Science in Semiconductor Processing

(DOI) https://doi.org/10.1016/j.mssp.2022.107025